Image Dimension Measurement System
IM-7000 series
Recommended Replaceable Products: 300 × 200 mm square stage Wide stage model incorporating programmable ring-illumination/light probe unit/Contact Height Measurement Unit - IM-8030T
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Measurement Head IM-7030T
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | IM-7030T | |||
Type | Head | |||
Image sensor | 1” 6.6 mega pixel monochrome CMOS | |||
Display | 10. 4” LCD monitor (XGA: 1024 × 768) | |||
Receiver lens | Double telecentric lens | |||
Image measurement | Field of view | Wide-field measurement mode: 300 mm × 200 mm (4× R50) | ||
Minimum display unit | 0.1 µm | |||
Repeatability | W/o stage movement | Wide-field measurement mode: ±1 µm | ||
With stage movement | Wide-field measurement mode: ±2 µm | |||
Measurement accuracy (±2σ) | W/o binding | Wide-field measurement mode: ±5 µm*1 | ||
With binding | Wide-field measurement mode: ±(7 + 0.02 L) µm*3 | |||
Light probe Measurement | Measurable area (XY) | 190 × 90 mm | ||
Maximum measurement depth | 30 mm | |||
Light probe diameter | ø3 mm | |||
Measuring force | 0.015 N | |||
Repeatability | ±2 µm*5 | |||
Measurement accuracy | ±(8 + 0.02 L) µm*6 | |||
Height Measurement | Measurement range | 0 to 75 mm | ||
Measuring force | 0.3 N | |||
Measurement accuracy (XY) | ±0.2 mm*7 | |||
Minimum display unit | 1 µm | |||
Measurable area (XY) | Wide-field measurement mode: 145 × 95 mm | |||
Repeatability | ±2 µm*8 | |||
Measurement accuracy | ±7.5 µm*9 | |||
Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) | ||
USB 3.1 | 4 ports (rear: 4) | |||
USB 2.0 series A | 2 ports (front: 2) | |||
External remote input | Non-voltage input (with and without contact) | |||
External output | OK/NG/FAIL/MEAS. | PhotoMos output | ||
Record | Hard disk drive | 500 GB | ||
Illumination system | Transparent | Telecentric transparent illumination | ||
Ring | Four division, multi-angle illumination (electric) | |||
XY stage | Moving range | 200 × 100 mm (electric) | ||
Withstand load | 7.5 kg | |||
Z stage | Moving range | 75 mm (electric) | ||
Power supply | Power voltage | 100–240 VAC, 50/60 Hz | ||
Current consumption | 430 VA or lower | |||
Environmental resistance | Ambient temperature | +10°C to 35°C | ||
Relative humidity | 20% RH to 80% RH (no condensation) | |||
Weight | Approx. 35 kg | |||
*1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position |