Image Dimension Measurement System
IM-6000 series
Recommended Replaceable Products: 200 mm square stage Model incorporating programmable ring-illumination/light probe unit - IM-8020
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Measurement Head: Wide-field model IM-6120
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | IM-6120 | |||
Type | Measurement head | |||
Image sensor | 1" 6.6 mega pixel CMOS | |||
Display | 10.4" LCD monitor (XGA: 1024 × 768) | |||
Receiver lens | Double telecentric lens | |||
Image measurement | Field of view | Wide field: ø100 × L200 mm, High precision: 25 × L125 mm | ||
Minimum display unit | 0.1 µm | |||
Repeatability | W/o stage movement | Wide field: ±1µm High precision: ±0.5µm | ||
With stage movement | Wide field: ±2µm High precision: ±1.5µm | |||
Measurement accuracy (±2σ) | W/o binding | Wide field: ±5µm*1 High precision: ±2µm*2 | ||
With binding | Wide field: ± (7 +0.02L)µm*3 High precision: ± (4 +0.02L)µm*4 | |||
External remote input | No-voltage input (with contacts, without contacts) | |||
External output | OK/NG/FAIL/MEAS. | Relay outputRated load 24 VDC 0.5AON resistance 50 mΩ or less | ||
Interface | LAN | RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T) | ||
USB 2.0 series A | 6 ports (front: 2, rear: 4) | |||
Record | Hard disk drive | 250 GB | ||
Illumination system | Transparent | Telecentric transparent illumination (Green LED) | ||
Ring | Four division ring illumination (White LED) | |||
External | Externally connected illumination (coaxial) | |||
X stage | Moving range | 100 mm (electric) | ||
Withstand load | 2 kg | |||
Z stage | Moving range | 30 mm (electric) | ||
Power supply | Power voltage | 100 to 240 VAC 50 / 60 Hz | ||
Power consumption | 310 mA or less | |||
Environmental resistance | Ambient temperature | +10 to +35 °C | ||
Relative humidity | 20 to 80 % RH (No condensation) | |||
Weight | Approx 31 kg | |||
*1 In the range of ø80 mm from the centre of the stage within the operating temperature range of +23°C ±1°C at the focused focal point position |