Head LM-1100

LM-1100 - Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model				LM-1100
Type				Head
Image sensor				1", 20-mega pixel monochrome CMOS
Display				10.4" LCD monitor (XGA: 1024 × 768)
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		225 mm × 125 mm
		High-precision measurement mode		206 mm × 106 mm
	Minimum display unit			0.1 µm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 µm
			High-precision measurement mode	±0.1 µm
		With stage movement	X/Y axis (E1)	±0.9 µm
			X/Y plane (E2)
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 µm^*1
			High-precision measurement mode	±0.7 µm^*2
		With stage movement	X/Y axis (E1)	±(1.8 + 0.02 L) µm^*3
			X/Y plane (E2)	±(2.8 + 0.02 L) µm^*3
AF height measurement	Repeatability			±2 µm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) µm^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load 24 V DC, 0.5 A ON resistance 50 mΩ or lower
Interface	LAN			RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1			2 ports (rear: 2)
	USB 2.0 Series A			4 ports (front: 2, rear: 2)
	Monitor output			DVI-D
Record	Hard disk drive			500 GB
Illumination system	Transparent			Telecentric transparent illumination
	Ring			Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric) Telecentric coaxial illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 V DC
	Output current			1.6 A (max.)
XY stage	Moving range			200 mm × 100 mm (electric)
	Withstand load			7 kg
Z stage	Moving range			75 mm (electric)
Power supply	Power voltage			100 to 240 V AC ±10% (50/60 Hz)
	Power consumption			430 VA or lower
Environmental resistance	Ambient temperature			+10 to 35°C^*5
	Relative humidity			20–80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 30 kg
^1 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position. ^2 In the range of ø5 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position ^3 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units) ^4 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C, set to a maximum measurement of 50 mm or less, (L = amount of Z stage movement in mm units). ^*5 +15 to 35°C with X/Y stage travel speed of 80 mm/s.

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